Micro gift bow
Affiliation:
Heriot-Watt University / University of Edinburgh
Description:
An electroplated Ni-Fe microbeam (8 µm wide, 2 µm thick) is suspended by removing the underlying material, while the central joints keep it anchored to the substrate. Further plasma processing involving high temperatures induces a stress gradient build-up that progressively curls the beam upwards, until the two ends touch.
Equipment used:
Cleanroom processing equipment, SEM imaging
